Spirit® High Power Femtosecond Lasers
Overview
High Power Femtosecond Lasers: The New Standard for High-Precision Micromachining
- High average power up to >140 W and pulse energy up to >600 µJ
- Adjustable repetition rate from single shot up to 30 MHz for processing at highest throughput
- User-configurable burst mode for processing with highest ablation efficiency
Products
Applications
- OLED Display Manufacturing
- Laser Cutting and Drilling
- Semiconductor Wafer Dicing
- Polymer Cutting
- Metal Cutting and Drilling
- Sapphire Cutting and Drilling
- Polycrystalline Diamond (PCD) Cutting and Ablation
- Precision Micromachining of Hard and Brittle Materials
- 3-Photon Fluorescence Microscopy
- Optical Parametric Amplifier Pumping
Specifications
Output Characteristics1, 2, 8
| Spirit One 1040-8 | Spirit One 1040-8-SHG | Spirit HE 1040-16 | Spirit HE 1040-16-SHG |
Spirit HE 1040-30 | Spirit HE 1040-30-SHG |
Spirit 1030-140 | Spirit 1030-100 | Spirit 1030-70 | Spirit 515-50 | |
|---|---|---|---|---|---|---|---|---|---|---|
| Wavelength | 1040 nm ±5 nm | 1030 nm ±5 nm | 515 nm ±3 nm | |||||||
| Output Power | >8 W | >16 W | >30 W | >140 W | >100 W | >70 W | >50 W at 1 MHz | |||
| Pulse Energy | >40 µJ at 200 kHz | >120 µJ at 100 kHz | >120 µJ at 250 kHz | >600 µJ at 100 kHz | >100 µJ at 1 MHz | >70 µJ at 1 MHz | >50 µJ at 1 MHz | |||
| Wavelength (SHG) | NA | 520 ±3 nm | NA | 520 ±3 nm | NA | 520 ±3 nm | NA | |||
| Output Power (SHG) | NA | >4 W at 200 kHz |
NA | >6 W at 100 kHz >8 W at 200 kHz |
NA | >15 W at 250 kHz | NA | |||
| Max Pulse Energy (SHG) | NA | >20 µJ at 200 kHz | NA | >60 µJ at 100 kHz >40 µJ at 200 kHz |
NA | >60 µJ at 250 kHz | NA | |||
| Repetition Rates1,3 | 200 kHz or 1 MHz | 100 kHz, 200 kHz or 1 MHz | 250 kHz or 1 MHz | 100 kHz -30 MHZ | 1-30 MHz | |||||
| Pulse Selection | Integrated pulse picker (AOM) | Single shot to 2 MHz using Integrated Pulse Picker (AOM) | ||||||||
| Pulse Width | <400 fs | |||||||||
| Pulse Width Tunability4, 5 | NA | <400 fs to 10 ps at 1040 nm <400 fs to 2 ps at 520 nm |
NA | |||||||
| Power Stability | <1% rms over 100 hours | |||||||||
| Pulse-to-Pulse Stability | <2% rms | |||||||||
| Spatial Mode | TEM00 (M2 <1.2) | |||||||||
| Beam Diameter | 2.0 ±0.4 mm | 2.5 ±0.5 mm | ||||||||
| Beam Divergence, full angle | <1 mrad at 1040 nm; <0.5 mrad at 520 nm | <1 mrad | <0.5 mrad | |||||||
| Burst Mode6,7 | NA | >120 µJ/burst at 1040 nm | >600 µJ/burst:1 | >100 µJ/burst:1 | >70 µJ/burst:1 | NA | ||||
| Pre-Pulse Contrast Ratio | >250:1 | |||||||||
| Polarization | Vertical | Horizontal | ||||||||
| Cold Start Time | <30 min. | |||||||||
| Warm Start Time | <15 min. | |||||||||
Environmental Specifications
| Spirit One 1040-8 | Spirit One 1040-8-SHG | Spirit HE 1040-16 | Spirit HE 1040-16-SHG |
Spirit HE 1040-30 | Spirit HE 1040-30-SHG |
Spirit 1030-140 | Spirit 1030-100 | Spirit 1030-70 | Spirit 515-50 | |
|---|---|---|---|---|---|---|---|---|---|---|
| Operating Temperature | 18–30°C (64–86°F) | 15–35°C (59–95 °F) | ||||||||
| Relative Humidity | <65%, non-condensing | |||||||||
Cooling Requirements
| Spirit One 1040-8 | Spirit One 1040-8-SHG | Spirit HE 1040-16 | Spirit HE 1040-16-SHG |
Spirit HE 1040-30 | Spirit HE 1040-30-SHG |
Spirit 1030-140 | Spirit 1030-100 | Spirit 1030-70 | Spirit 515-50 | |
|---|---|---|---|---|---|---|---|---|---|---|
| Laser Head | Water cooled | |||||||||
| Power Supply | NA | Air cooled | Water cooled | |||||||
Utility Requirements
| Spirit One 1040-8 | Spirit One 1040-8-SHG | Spirit HE 1040-16 | Spirit HE 1040-16-SHG |
Spirit HE 1040-30 | Spirit HE 1040-30-SHG |
Spirit 1030-140 | Spirit 1030-100 | Spirit 1030-70 | Spirit 515-50 | |
|---|---|---|---|---|---|---|---|---|---|---|
| Voltage | Laser Head: 24 VDC Chiller: 100-240 V, 50/60 Hz |
Laser controller (including chiller): 100-240 V, 50 Hz/60 Hz | 208–230 V, 50/60 Hz | |||||||
| Current | <15 A | <16 A | ||||||||
Laser Head Physical Characteristics
| Spirit One 1040-8 | Spirit One 1040-8-SHG | Spirit HE 1040-16 | Spirit HE 1040-16-SHG |
Spirit HE 1040-30 | Spirit HE 1040-30-SHG |
Spirit 1030-140 | Spirit 1030-100 | Spirit 1030-70 | Spirit 515-50 | |
|---|---|---|---|---|---|---|---|---|---|---|
| Dimensions (L x W x H) | 26.2 x 12.2 x 5.2 in (665 x 310 x 133 mm) |
29.1 x 12.2 x 5.2 in (740 x 310 x 133 mm) |
32.5 x 14 x 6.5 in (875 x 340 x 160 mm) |
39.5 x 14.5 x 8.1 in (1003 x 369 x 205 mm) |
||||||
| Weight | 88 lb (40 kg) | 99 lb (45 kg) | 155 lb (70 kg) | |||||||
Rack with Power Supply and Chiller Physical Characteristics
| Spirit One 1040-8 | Spirit One 1040-8-SHG | Spirit HE 1040-16 | Spirit HE 1040-16-SHG |
Spirit HE 1040-30 | Spirit HE 1040-30-SHG |
Spirit 1030-140 | Spirit 1030-100 | Spirit 1030-70 | Spirit 515-50 | |
|---|---|---|---|---|---|---|---|---|---|---|
| Dimensions (L x W x H) | 19.0 x 15.8 x 10.5 in (484 x 400 x 267 mm) |
23.6 x 22.0 x 29.4 in (600 x 560 x 746 mm) |
31.5 x 21.8 x 43.4 in (800 x 553 x 1102 mm) |
|||||||
| Weight | 68 lb (31 kg) | 176 lb (80 kg) | 220 lb (100 kg) | |||||||
Footnotes:
- Due to our continuous product improvement program, specifications may change without notice.
- Spirit lasers with the acronym “-SHG” in the laser model are dual wavelength lasers. Two wavelength IR and Green are available from one laser system.
- Specific pre-calibrated repetition rates are available; please contact Spectra-Physics.
- Pulse duration tunability is optional; if implemented, pulse duration is software tunable.
- Conversion efficiency for SHG module will be lower for longer pulse width. Conversion efficiency for SHG is not specified for longer pulse width.
- Burst mode operation is optional; if implemented the number of pulses per burst can be selected in GUI.
- Repetition rates are limited to ≤500 kHz for Spirit HE and ≤2 MHz for Spirit lasers with the burst mode option.
- Spirit lasers are Class IV - High Power Lasers, whose beam are, by definition, a safety and fire hazard. Take precautions to prevent exposure to the direct and reflected beams. Diffuse as well as specular reflections can cause severe skin or eye damage.
Features
Overview
Spirit® sets new standards for femtosecond lasers in high-precision industrial manufacturing for micromachining of polymers, thin metals, sapphire, polycrystalline diamond, and many other materials. These lasers deliver high average power, high pulse energy, and high repetition rates for increased throughput. Customers benefit from the shortest industrially available pulse duration and superior beam quality that in turn enables machining complex and challenging parts with highest precision and quality with literally no heat affected zone (HAZ) at the highest throughput.
Highest Quality, High Throughput Micromachining
Our new additions to the industry-proven Spirit platform offers impressive versatility and performance, enabling a variety of applications. High average power (>140 W) and high pulse energy (>600 µJ) combined with high repetition rates push femtosecond micromachining applications to highest levels of throughput at lowest cost-of-ownership. The user-configurable burst mode enables processing with increased ablation efficiency, and thus increased throughput and quality for certain materials. Pulse energy and repetition rate adjustability (single shot – 30 MHz) make the Spirit 1030-140 the ideal source for ablation and cutting. The integrated pulse picker offers full control of the laser output with single pulse selection and fast power control via an analog input signal.
Spirit 515-50 offers an output power of >50 W and a typical pulse width of <300 fs at a wavelength of 515 nm. At this shorter wavelength, machining of the finest features is possible, depending on the material, at equal or even higher speeds compared to those obtained with other technologies.
24/7 Industrial Reliability
The Spirit lasers are designed and tested to rigorous quality standards for reliable 24/7 operation. The built-in data logging and analysis capability allows monitoring of all relevant laser parameters over the life time of the system. As such, this represents an indispensable diagnostics tool for service and preventive maintenance which significantly enhances uptime and thus productivity of the tool.
Resources
Data Sheets
- Spirit Datasheet (556.1 kB, PDF)
- Spirit HE Datasheet (832.9 kB, PDF)
- Spirit One Datasheet (933.2 kB, PDF)
Literature
- Ultrafast Laser Brochure (4.6 MB, PDF)
Drawings & CAD
- Spirit HE Dimensions (1.5 MB, PDF)
- Spirit One Dimensions (771.1 kB, PDF)
- Spirit Dimensions (427.1 kB, PDF)
Selection Guides
- Spirit Component Selection Guide (952.7 kB, PDF)
Application Notes
- Nitinol Machining for Precision Applications Using Spirit® Femtosecond Lasers (1.1 MB, PDF)
- Polycrystalline Diamond Machining with Femtosecond Bursts (475.6 kB, PDF)
- Fabrication of Highly Transparent Anti-Fogging Glass Surfaces (456.3 kB, PDF)
- Processing of Ultrahard Materials at Superior Speed and Quality (1.3 MB, PDF)
- Flexible OLED Manufacturing with High Power fs Laser (808.8 kB, PDF)
- High Speed Processing of Plastics with a 100 W fs Laser (468.5 kB, PDF)
- Fabrication of Superhydrophobic and Superhydrophilic Surfaces (444.9 kB, PDF)
- Fabrication of Optical Fiber Diffusors (372.9 kB, PDF)
- Laser Micromachining of Heat-sensitive Polymers (356 kB, PDF)
- High Quality, High Speed Processing of Transparent Brittle Materials (507.8 kB, PDF)
- Ultrashort-pulse Laser Structuring (414.2 kB, PDF)
- Femtosecond Laser Irradiation and Chemical Etching (FLICE); Waveguide Writing (2.8 MB, PDF)
Technical Articles
- Nitinol Machining for Precision Applications Using Femtosecond Lasers
- Hybrid Fiber Lasers Create New Capabilities for Micromachining
- Cutting Thin Glasses with Ultrafast Lasers (464.9 kB, PDF)
- Laser Processing of Ceramics for Microelectronics Manufacturing
- Femtosecond Lasers: More Micromachining Apps
Manuals
- Spirit Pre-Installation Guide (298.6 kB, PDF)
Ultra-High Velocity 