다목적 UV, 녹색 및 IR 피코초 레이저: 피코초 미세가공의 새로운 표준
IceFyre UV50 | IceFyre UV30 | IceFyre GR50 | IceFyre IR50 | |
---|---|---|---|---|
Wavelength | 355 nm | 532 nm | 1064 nm | |
Power2, 3 | >50 W @ 1250 kHZ | >30 W typical @ 500 kHz >25 W @ 800 kHz >20 W typical @ 1 MHz | >50 W @ 500 kHZ | >50 W @ 400 kHZ |
Maximum Pulse Energy, typical (greater pulse energy per burst possible with TimeShift ps) | >40 µJ @ 1250 kHz | >60 µJ typical @ 500 kHz >31 µJ @ 800 kHz >20 µJ typical @ 1 MHz | >100 µJ @ 500 kHz | >200 µJ @ 200 kHz |
Repetition Rate Range6 | Single shot to 10 MHz | |||
Pulse Width, FWHM2 | <12 ps (10 ps typical) | <15 ps (13 typical) | ||
TimeShift ps | yes | |||
Pulse-to-Pulse Energy Stability2 | <2.0%, 1 σ | <1.5%, 1 σ | ||
Power Stability (after warm-up)2 | <1%, 1 σ, over 8 hours |
IceFyre UV50 | IceFyre UV30 | IceFyre GR50 | IceFyre IR50 | |
---|---|---|---|---|
Spatial Mode2 | TEM00, M2 <1.3 | |||
Polarization | >100:1 vertical | >100:1 horizontal | >100:1 vertical | |
Beam Diameter (D4σ)2 | 5.0 ±0.5 mm | 3.5 ±0.35 mm | 3.0 ±0.3 mm | |
Beam Divergence, full angle2 | <0.20 mrad | <0.75 mrad | ||
Beam Asymmetry2 | <1.10 (≥90% circularity) | |||
Boresight Tolerance2 | ±0.5 mm, ±5 mrad | |||
Beam Pointing Stability2 | <±25 µrad/°C |
IceFyre UV50 | IceFyre UV30 | IceFyre GR50 | IceFyre IR50 | |
---|---|---|---|---|
Warm-up Time, typical | <45 min from warm start mode,<60 min from cold start7 | <15 min from start mode, <40 min from cold start7 | ||
Temperature Range | 15-30°C | |||
Altitude | 0-2,000 m | |||
Humidity7 | 0-90% non-condensing, dew point <19°C |
IceFyre UV50 | IceFyre UV30 | IceFyre GR50 | IceFyre IR50 | |
---|---|---|---|---|
Temperature Range | 0-50°C | |||
Altitude | 0-10,000 m | |||
Humidity7 | 0-90% non-condensing, dew point <22°C |
IceFyre UV50 | IceFyre UV30 | IceFyre GR50 | IceFyre IR50 | |
---|---|---|---|---|
Water Temperature (laser inlet) | 20 ±1°C, stable to ± 0.5°C | |||
Water Flow Rate (at laser head) | 1.8 GPM typical (6.8 LPM) | |||
AC Input | >200 VAC (180-260), 2000 W Max, 50/60 Hz, single phase | 100-240 VAC, 1000 W Max, 50/60 Hz, single phase | ||
Heat Load (at laser head) | <1600 W | <800 W (600 W typical) | ||
Heat Load (at power supply) | <300 W | <200 W | ||
Total Power Consumption | <2000 W | <1000 W |
IceFyre UV50 | IceFyre UV30 | IceFyre GR50 | IceFyre IR50 | |
---|---|---|---|---|
Laser Dimensions (L x W x H)4 | 42.14 x 19.88 x 7.63 in (1070.4 x 504.8 x 193.06 mm) | 35.00 x 12.13 x 7.63 in (889.0 x 308.0 x 193.8 mm) | 29.50 x 12.13 x 7.50 in (749.5 x 308.0 x 190.6 mm) | |
Laser Weight | 215 lbs (97.5 kg) | 108 lbs (49 kg) | 95 lbs (43 kg) | |
Dimension (Utility Module) (L x W x H) | 21.16 x 18.98 x 3.47 in (537.5 x 482.1 x 88.1 mm) | |||
Weight (Utility Module) | 24.70 lbs (11.20 kg) | 22.80 lbs (10.34 kg) | 15.00 lbs (6.80 kg) |
IceFyre UV50 | IceFyre UV30 | IceFyre GR50 | IceFyre IR50 | |
---|---|---|---|---|
EU RoHS 2 Compliant, China RoHS 2, CE Compliant | Product compliant with restriction of hazardous substances | |||
Internal Power Monitor | May be calibrated against an external power meter | |||
Alignment Beam Mode | Lower power beam for installation and alignment in a tool(IR requires optional AOM) | |||
Replaceable Output Window | Customer replaceable to maintain power in harsh environments | |||
Data Log(includes customer version as well)9 | Long and short term recording for diagnostics and equipment maintenance | |||
Optional Safety Shutter | Externally mounted for easy field service and customer replaceable | |||
Optional Output AOM | NA (Power attenuation by software control. Consult Spectra-Physics) | Provides power attenuation at constant power, used with trigger, gate and pulse on demand, use as a process shutter | ||
Optional TimeShift ps GUI | Enables waveform customization |
Footnotes:
IceFyre® redefines picosecond micromachining lasers with a patent-pending design to achieve exceptional performance and unprecedented versatility at industry leading cost-performance. Based on Spectra-Physics’ It’s in the Box™ design, IceFyre integrates laser and controller into the industry’s smallest package.
The IceFyre UV50 is the highest performing UV ps laser on the market, providing >50 W of UV output power at 1.25 MHz (>40 μJ) with 100’s μJ pulse energies in burst mode, and pulse widths of 10 ps. The IceFyre UV50 sets new standards in power and repetition rates from single shot to 10 MHz. The IceFyre UV30 offers >30 W of typical UV output power with pulse energy >60 µJ (greater pulse energies in burst mode) and delivers exceptional performance from single shot to 10 MHz. The IceFyre GR50 delivers >50 W of green output power at pulse energy >100 µJ at 500 kHz. The IceFyre IR50 outputs >50 W of IR power at 400 kHz single pulse and delivers exceptional performance from single shot to 10 MHz.
The IceFyre laser’s unique design exploits fiber laser flexibility and Spectra-Physics’ exclusive power amplifier capability to enable TimeShift™ ps programmable burst-mode technology for the highest versatility and performance in the industry. A standard set of waveforms is provided with each laser; an optional TimeShift ps GUI is available for creating custom waveforms. The laser design enables true pulse-on-demand (POD) and position-synchronized output (PSO) triggering with the lowest timing jitter in its class for high-quality processing at high scan speeds, e.g. when using a polygon scanner.
MKS 의 깊은 경험과 기술력을 바탕으로 IceFyre FS 레이저는 높은 신뢰성과 낮은 소유 비용을 담보하기 위한 광범위한 환경 적격성 평가 테스트를 통과 했습니니다. 완전히 자동화된 컴퓨터 제어로, 레이저는 24/7 작동 중에 출력, 빔 파라미터, 그리고 빔 포인팅에서 탁월한 안정성을 보여 까다로운 어플리케이션 분야에서 높은 정밀도와 재현성을 제공합니다.
IceFyre 레이저의 출력 확인과 분석은, Ophir F80(120)A-CM-17 (7Z07103) 열 전력 센서와 Centauri 레이저 파워 미터를 추천합니다. 이 레이저 측정 장비에 대한 추가 정보는 ophiropt.com 에서 웹사이틍서 찾아 볼 수 있습니다. 다른 Ophir 센서와 미터기도 용도에 따라 IceFyre 에 적합할 수 있습니다. 또한 Ophir 는 레이저 시스템 개발자들과의 협력을 통해 임베디드 빔 진단법을 구축하여, OEM 솔루션으로서 시스템 성능을 모니터합니다.
It is critical to choose the right optics and optomechanical components that work best with your IceFyre laser. IceFyre’s high IR peak power necessitates optics that have a high damage threshold. MKS Newport offers a wide selection of the highest quality optics and optical components covering the entire spectrum UV, VIS, NIR and IR wavelengths to help you with your most challenging applications.