MKS Launches High Power, High Energy Spectra-Physics® Industrial Femtosecond Laser

New Spirit 1030-140 Outputs >600 µJ Energy, >140 W Power for High Throughput Ultrashort Pulse Micromachining

Andover, MA - February 4, 2020 - MKS Instruments, Inc.(NASDAQ: MKSI) ) introduces its Spectra-Physics® Spirit® 1030-140, an industrial femtosecond hybrid fiber laser that delivers >140 W power and >600 µJ pulse energy with ultrashort <400 fs pulses in the infrared. With the high performance and added flexibility with adjustable repetition rates from single shot up to 30 MHz and user-configurable burst mode operation, the new laser is ideal for high throughput, highest quality micromachining of polymers, thin metals, sapphire, polycrystalline diamond and many other materials for consumer electronics, medical device and industrial applications.

"The Spectra-Physics Spirit 1030-140 further extends the market leadership of MKS in lasers for micromachining to a new power and energy level for femtosecond lasers," said Dave Allen, senior vice president and general manager for Spectra-Physics lasers. "With the exceptional performance, flexible operation and high reliability, the new laser enables high throughput processing while delivering femtosecond machining quality."

Spirit 1030-140 offers best-in-class beam quality and includes an integrated pulse picker for single-pulse selection and fast power control for high process throughput. Based on the proven Spirit industrial product platform, Spirit 1030-140 provides 24/7 industrial reliability and low cost of ownership. When coupled with multiple Spirit-OPA and Spirit-NOPA wavelength conversion units, the combined system delivers high energy tunable laser output across the visible and infrared for 3-photon deep-tissue bio-imaging and ultrafast spectroscopy applications.

Spectra-Physics' Spirit 1030-140 laser will be featured at SPIE Photonics West, Moscone Center, San Francisco, February 4-6, 2020. Please visit MKS at booth #927 for a demonstration. For more information, please see

About MKS Instruments

MKS Instruments, Inc. (NASDAQ: MKSI) is a global provider of instruments, systems, subsystems and process control solutions that measure, monitor, deliver, analyze, power and control critical parameters of advanced manufacturing processes to improve process performance and productivity for our customers. Our products are derived from our core competencies in pressure measurement and control, flow measurement and control, gas and vapor delivery, gas composition analysis, electronic control technology, reactive gas generation and delivery, power generation and delivery, vacuum technology, lasers, photonics, optics, precision motion control, vibration control and laser-based manufacturing systems solutions. We also provide services relating to the maintenance and repair of our products, installation services and training. Our primary served markets include semiconductor, industrial technologies, life and health sciences, research and defense. Additional information can be found at

About the Spectra-Physics Brand

Spectra-Physics is a brand within the MKS Instruments Light & Motion division. The Spectra-Physics product portfolio consists of a broad spectrum of lasers for precision industrial and scientific research applications. Spectra-Physics products combine groundbreaking laser technologies with deep applications expertise to deliver disruptive performance and lower total cost of ownership. From the manufacturing floor and semiconductor fab to the research laboratory, Spectra-Physics lasers enhance our customers’ capabilities and productivity in the semiconductor, industrial technologies, life and health sciences, and research markets. For more information, visit

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