MKS Launches High Power, High Energy Spectra-Physics® Industrial Femtosecond Laser

New Spirit 1030-140 Outputs >600 µJ Energy, >140 W Power for High Throughput Ultrashort Pulse Micromachining

Andover, MA - February 4, 2020 - MKS Instruments, Inc.(NASDAQ: MKSI) ) introduces its Spectra-Physics® Spirit® 1030-140, an industrial femtosecond hybrid fiber laser that delivers >140 W power and >600 µJ pulse energy with ultrashort <400 fs pulses in the infrared. With the high performance and added flexibility with adjustable repetition rates from single shot up to 30 MHz and user-configurable burst mode operation, the new laser is ideal for high throughput, highest quality micromachining of polymers, thin metals, sapphire, polycrystalline diamond and many other materials for consumer electronics, medical device and industrial applications.

"The Spectra-Physics Spirit 1030-140 further extends the market leadership of MKS in lasers for micromachining to a new power and energy level for femtosecond lasers," said Dave Allen, senior vice president and general manager for Spectra-Physics lasers. "With the exceptional performance, flexible operation and high reliability, the new laser enables high throughput processing while delivering femtosecond machining quality."

Spirit 1030-140 offers best-in-class beam quality and includes an integrated pulse picker for single-pulse selection and fast power control for high process throughput. Based on the proven Spirit industrial product platform, Spirit 1030-140 provides 24/7 industrial reliability and low cost of ownership. When coupled with multiple Spirit-OPA and Spirit-NOPA wavelength conversion units, the combined system delivers high energy tunable laser output across the visible and infrared for 3-photon deep-tissue bio-imaging and ultrafast spectroscopy applications.

Spectra-Physics' Spirit 1030-140 laser will be featured at SPIE Photonics West, Moscone Center, San Francisco, February 4-6, 2020. Please visit MKS at booth #927 for a demonstration. For more information, please see

About MKS Instruments

MKS Instruments, Inc. (NASDAQ: MKSI) is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity. Our products are derived from our core competencies in pressure measurement and control, materials delivery, gas composition analysis, control and information technology, power and reactive gas generation, vacuum technology, photonics, optics, lasers and motion control. Our primary served markets are manufacturers of capital equipment for electronic thin film, process manufacturing, environmental monitoring and life sciences, as well as government and research.

About the Spectra-Physics Brand

The Spectra-Physics brand comprises breakthrough laser technologies that transform the way businesses operate and people live. From the manufacturing floor to the operating room to the research laboratory, Spectra-Physics has blazed a trail of discovery and success in lasers that continues to advance every day. Spectra-Physics is singularly focused on helping customers use precision laser technologies to advance leading-edge science and propel industries forward. We do so by offering groundbreaking technologies, deep applications expertise, disruptive cost-performance, a commitment to world-class customer experience, and the highest standards for operational excellence and continuous global improvement.

Company Contacts

Herman Chui
Sr. Director of Product Marketing
Tel: +1 408-980-6996

Helen Chan
Marketing Communications Manager
Tel: +1 408-980-5883