Spirit®

HIGH POWER FEMTOSECOND LASERS:
THE NEW STANDARD FOR HIGH-PRECISION MICROMACHINING

  • High average power up to >140 W and pulse energy up to >600 µJ
  • Adjustable repetition rate from single shot up to 30 MHz for processing
         at highest throughput
  • User-configurable burst mode for processing with highest ablation efficiency

The Spirit family sets new standards for femtosecond lasers in high-precision industrial manufacturing for micromachining of polymers, thin metals, sapphire, polycrystalline diamond, and many other materials. These lasers deliver high average power, high pulse energy, and high repetition rates for increased throughput. Customers benefit from the shortest industrially available pulse duration and superior beam quality that in turn enables machining complex and challenging parts with highest precision and quality with literally no heat affected zone (HAZ) at the highest throughput. Spirit lasers are designed for industrial use and offer reliable and robust 24/7 operation with lowest cost of ownership. The Spirit lasers also provide unprecedented performance for pumping of non-linear OPAs for 3-photon microscopy and spectroscopy applications.

Highest-Precision Machining of the Finest Features with Highest Throughput

Our new additions to the industry-proven Spirit platform offers impressive versatility and performance, enabling a variety of applications. High average power (>140 W) and high pulse energy (>600 µJ) combined with high repetition rates push femtosecond micromachining applications to highest levels of throughput at lowest cost-of-ownership. The user-configurable burst mode enables processing with increased ablation efficiency, and thus increased throughput and quality for certain materials. Pulse energy and repetition rate adjustability (single shot – 30 MHz) make the Spirit 1030-140 the ideal source for ablation and cutting. The integrated pulse picker offers full control of the laser output with single pulse selection and fast power control via an analog input signal.

Spirit 515-50 offers an output power of >50 W and a typical pulse width of <300 fs at a wavelength of 515 nm. At this shorter wavelength, machining of the finest features is possible, depending on the material, at equal or even higher speeds compared to those obtained with other technologies.

24/7 Industrial Reliability

The Spirit lasers are designed and tested to rigorous quality standards for reliable 24/7 operation. The built-in data logging and analysis capability allows monitoring of all relevant laser parameters over the life time of the system. As such, this represents an indispensable diagnostics tool for service and preventive maintenance which significantly enhances uptime and thus productivity of the tool.

Applications

OLED display manufacturing
Semiconductor wafer dicing
Polymer cutting
Metal drilling and cutting
Precision machining of hard and brittle materials
Polycrystalline diamond (PCD) cutting and ablation
Sapphire cutting and drilling
3-photon microscopy
Optical parametric amplifier pumping
 Spirit One 1040-8Spirit One 1040-8-SHGSpirit HE 1040-16Spirit HE
1040-16-SHG
Spirit HE 1040-30Spirit HE
1040-30-SHG
Spirit 1030-140Spirit 1030-100Spirit 1030-70Spirit 515-50
Wavelength 1040 nm ±5 nm 1030 nm ±5 nm 515 nm ±3 nm
Output Power >8 W >16 W >30 W >140 W >100 W >70 W >50 W
Pulse Energy >40 µJ at 200 kHz >120 µJ at 100 kHz >120 µJ at 250 kHz >600 µJ2 >100 µJ >70 µJ >50 µJ3
Wavelength (SHG) NA 520 ±3 nm NA 520 ±3 nm NA NA 515 ±3 nm3
Output Power (SHG)
NA >4 W at
200 kHz
NA >6 W at 100 kHz
>8 W at 200 kHz
NA >15 W at 250 kHz NA >50 W2
Max Pulse Energy (SHG)
NA >20 μJ at 200 kHz NA >60 µJ at 100 kHz
>40 µJ at 200 kHz
NA >60 µJ at 250 kHz NA >50 µJ2
Repetition Rates1,2 200 kHz or 1 MHz 100 kHz, 200 kHz or 1 MHz 250 kHz or 1 MHz 0.1-30 MHZ  1-30 MHz
Pulse Selection Integrated pulse picker (AOM) Single shot to 2 MHz using Integrated Pulse Picker (AOM)
Pulse Width <400 fs
Pulse Width Tunability3,4 ≤400 fs to 4 ps <400 fs to 10 ps at 1040 nm NA
Power Stability <1% rms over 100 hours
Pulse-to-Pulse Stability <2% rms
Spatial Mode TEM00 (M2 <1.2)
Beam Diameter 2.5 ±0.5 mm
Beam Divergence, full angle <1 mrad  at 1040 nm; <0.5 mrad at 520 nm <1 mrad <0.5 mrad
Burst Mode5,6 NA >600 µJ/burst:1 >100 µJ/burst:1 >70 µJ/burst:1 NA
Pre-Pulse Contrast Ratio >250:1
Polarization Vertical Horizontal
Cold Start Time <30 min.
Warm Start Time <15 min.
   
 Spirit One 1040-8Spirit One 1040-8-SHGSpirit HE 1040-16Spirit HE 1040-16-SHGSpirit HE 1040-30Spirit HE 1040-30-SHGSpirit 1030-140Spirit 1030-100Spirit 1030-70Spirit 515-50  
Operating Temperature 18–30°C (64–86°F) 15–35°C (59–95 °F)  
Relative Humidity <65%, non-condensing  
   
 Spirit One 1040-8Spirit One 1040-8-SHGSpirit HE 1040-16Spirit HE 1040-16-SHGSpirit HE 1040-30Spirit HE 1040-30-SHGSpirit 1030-140Spirit 1030-100Spirit 1030-70Spirit 515-50  
Laser Head Water cooled  
Power Supply NA Air cooled Water cooled  
   
 Spirit One 1040-8Spirit One 1040-8-SHGSpirit HE 1040-16Spirit HE 1040-16-SHGSpirit HE 1040-30Spirit HE 1040-30-SHGSpirit 1030-140Spirit 1030-100Spirit 1030-70Spirit
515-50
 
Voltage Laser Head: 24 VDC
Chiller: 100-240 V, 50/60 Hz
Laser controller (including chiller): 100-240 V, 50 Hz/60 Hz 208–230 V, 50/60 Hz  
Current <15 A <16 A  
   
 Spirit One 1040-8Spirit One 1040-8-SHGSpirit HE 1040-16Spirit HE 1040-16-SHGSpirit HE 1040-30Spirit HE 1040-30-SHGSpirit 1030-140Spirit 1030-100Spirit 1030-70Spirit 515-50  
Dimensions (L x W x H) 26.2 x 12.2 x 5.2 in
(665 x 310 x 133 mm)
29.1 x 12.2 x 5.2 in
(740 x 310 x 133 mm)
32.5 x 14 x 6.5 in
(875 x 340 x 160 mm)
39.5 x 14.5 x 8.1 in
(1003 x 369 x 205 mm)
 
Weight 88 lb (40 kg) 99 lb (45 kg) 155 lb (70 kg)  
   
 Spirit One 1040-86Spirit One 1040-8-SHG6Spirit HE 1040-16Spirit HE 1040-16-SHGSpirit HE 1040-30Spirit HE 1040-30-SHGSpirit 1030-140Spirit 1030-100Spirit 1030-70Spirit 515-50  
Dimensions (L x W x H) 19.0 x 15.8 x 10.5 in
(484 x 400 x 267 mm)
23.6 x 22.0 x 29.4 in
(600 x 560 x 746 mm)
31.5 x 21.8 x 43.4 in
(800 x 553 x 1102 mm)
 
Weight 68 lb (31 kg) 176 lb (80 kg) 220 lb (100 kg)  

1. Due to our continuous product improvement program, specifications may change without notice.
2. Pulse energy of >600µJ at 100 kHz..
3. Maximum conversion efficiency for SHG at 1 MHz.
4. Specific pre-calibrated repetition rates are available; please contact Spectra-Physics.
5. Burst mode operation is optional; if implemented the number of pulses per burst (<12 pulses) can be selected in GUI.
6. Repetition rates are limited to ≤2 MHz for Spirit 1030 lasers with the burst mode option.
7. Spirit lasers are Class IV - High Power Lasers, whose beam are, by definition, a safety and fire hazard. Take precautions to prevent exposure to the direct
    and reflected beams. Diffuse as well as specular reflections can cause severe skin or eye damage.

Spirit Dimensions

Spirit Laser Rack with Power Supply and Chiller Dimensions

Spirit HE Dimensions

Spirit HE Rack with Power Supply and Chiller Dimensions

Spirit One 1040-8 Dimensions

Spirit One 1040-8-SHG Dimensions

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