High-Power Femtosecond Lasers: The New Standard for High-Precision Micromachining
Applications
- OLED Display Manufacturing
- Laser Cutting and Drilling
- Semiconductor Wafer Dicing
- Polymer Cutting
- Metal Cutting and Drilling
- Sapphire Cutting and Drilling
- Polycrystalline Diamond (PCD) Cutting and Ablation
- Precision Micromachining of Hard and Brittle Materials
- 3-Photon Fluorescence Microscopy
- Optical Parametric Amplifier Pumping
사양
Output Characteristics1, 2, 8
| Spirit One 1040-8 | Spirit One 1040-8-SHG | Spirit HE 1040-16 | Spirit HE 1040-16-SHG |
Spirit HE 1040-30 | Spirit HE 1040-30-SHG |
|
|---|---|---|---|---|---|---|
| Wavelength | 1040 nm ±5 nm | 1040 nm ±8 nm | ||||
| Output Power | >8 W | >16 W | >30 W | |||
| Pulse Energy | >40 µJ at 200 kHz | >120 µJ at 100 kHz | >120 µJ at 250 kHz | |||
| Wavelength (SHG) | NA | 520 ±3 nm | NA | 520 ±3 nm | NA | 520 ±3 nm |
| Output Power (SHG) | NA | >4 W at 200 kHz |
NA | >6 W at 100 kHz >8 W at 200 kHz |
NA | >15 W at 250 kHz |
| Max Pulse Energy (SHG) | NA | >20 µJ at 200 kHz | NA | >60 µJ at 100 kHz >40 µJ at 200 kHz |
NA | >60 µJ at 250 kHz |
| Repetition Rates1,3 | 200 kHz or 1 MHz | 100 kHz, 200 kHz or 1 MHz | 250 kHz or 1 MHz | |||
| Pulse Selection | Integrated pulse picker (AOM) | |||||
| Pulse Width | <500 fs | <400 fs | ||||
| Pulse Width Tunability4, 5 | NA | <400 fs to 10 ps at 1040 nm <400 fs to 2 ps at 520 nm |
||||
| Power Stability | <1% rms over 100 hours | |||||
| Pulse-to-Pulse Stability | <2% rms | |||||
| Spatial Mode | TEM00 (M2 <1.2) | |||||
| Beam Diameter | 2.0 ±0.4 mm | 2.5 ±0.5 mm | ||||
| Beam Divergence, full angle | <1 mrad at 1040 nm; <0.5 mrad at 520 nm | |||||
| Burst Mode6,7 | NA | >120 µJ/burst at 1040 nm | ||||
| Pre-Pulse Contrast Ratio | >250:1 | |||||
| Polarization | Vertical | Horizontal | ||||
| Cold Start Time | <30 min. | |||||
| Warm Start Time | <15 min. | |||||
Environmental Specifications
| Spirit One 1040-8 | Spirit One 1040-8-SHG | Spirit HE 1040-16 | Spirit HE 1040-16-SHG |
Spirit HE 1040-30 | Spirit HE 1040-30-SHG |
|
|---|---|---|---|---|---|---|
| Operating Temperature | 18–30°C (64–86°F) | |||||
| Relative Humidity | <65%, non-condensing | |||||
Cooling Requirements
| Spirit One 1040-8 | Spirit One 1040-8-SHG | Spirit HE 1040-16 | Spirit HE 1040-16-SHG |
Spirit HE 1040-30 | Spirit HE 1040-30-SHG |
||
|---|---|---|---|---|---|---|---|
| Laser Head | Water-cooled | ||||||
| Power Supply | NA | Air-cooled | |||||
Utility Requirements
| Spirit One 1040-8 | Spirit One 1040-8-SHG | Spirit HE 1040-16 | Spirit HE 1040-16-SHG |
Spirit HE 1040-30 | Spirit HE 1040-30-SHG |
|
|---|---|---|---|---|---|---|
| Voltage | Laser Head: 24 VDC Chiller: 100-240 V, 50/60 Hz |
Laser controller (including chiller): 100-240 V, 50 Hz/60 Hz | ||||
| Current | <15 A | |||||
Laser Head Physical Characteristics
| Spirit One 1040-8 | Spirit One 1040-8-SHG | Spirit HE 1040-16 | Spirit HE 1040-16-SHG |
Spirit HE 1040-30 | Spirit HE 1040-30-SHG |
|
|---|---|---|---|---|---|---|
| Dimensions (L x W x H) | 26.2 x 12.2 x 5.2 in (665 x 310 x 133 mm) |
29.1 x 12.2 x 5.2 in (740 x 310 x 133 mm) |
32.5 x 14 x 6.5 in (875 x 340 x 160 mm) |
|||
| Weight | 88 lb (40 kg) | 99 lb (45 kg) | 155 lb (70 kg) | |||
Rack with Power Supply and Chiller Physical Characteristics
| Spirit One 1040-8 | Spirit One 1040-8-SHG | Spirit HE 1040-16 | Spirit HE 1040-16-SHG |
Spirit HE 1040-30 | Spirit HE 1040-30-SHG |
|
|---|---|---|---|---|---|---|
| Dimensions (L x W x H) | 19.0 x 15.8 x 10.5 in (484 x 400 x 267 mm) |
23.6 x 22.0 x 29.4 in (600 x 560 x 746 mm) |
||||
| Weight | 68 lb (31 kg) | 176 lb (80 kg) | ||||
Footnotes:
- Due to our continuous product improvement program, specifications may change without notice.
- Spirit lasers with the acronym “-SHG” in the laser model are dual wavelength lasers. Two wavelength IR and Green are available from one laser system.
- Specific pre-calibrated repetition rates are available; please contact Spectra-Physics.
- Pulse duration tunability is optional; if implemented, pulse duration is software tunable.
- Conversion efficiency for SHG module will be lower for longer pulse width. Conversion efficiency for SHG is not specified for longer pulse width.
- Burst mode operation is optional; if implemented the number of pulses per burst can be selected in GUI.
- Repetition rates are limited to ≤500 kHz for Spirit HE and ≤2 MHz for Spirit lasers with the burst mode option.
- Spirit lasers are Class IV - High Power Lasers, whose beam are, by definition, a safety and fire hazard. Take precautions to prevent exposure to the direct and reflected beams. Diffuse as well as specular reflections can cause severe skin or eye damage.
- TypeFemtosecond Laser
- Wavelength RegionIR
- Power2-8 W
4-16 W - Pulse Energy>20 µJ
>40 µJ - 펄스폭fs
- Wavelength520 nm
1040 nm - ApplicationPrecision Laser Surgury
- Process TypeRepairing
- ProcessTransient Absorption Spectroscopy
기능
Overview
Spirit® sets new standards for femtosecond lasers in high-precision industrial manufacturing for micromachining of polymers, thin metals, sapphire, polycrystalline diamond, and many other materials. These lasers deliver high average power, high pulse energy, and high repetition rates for increased throughput. Customers benefit from the shortest industrially available pulse duration and superior beam quality that in turn enables machining complex and challenging parts with highest precision and quality with literally no heat affected zone (HAZ) at the highest throughput.
Highest Quality, High Throughput Micromachining
Our new additions to the industry-proven Spirit platform offers impressive versatility and performance, enabling a variety of applications. High average power (>140 W) and high pulse energy (>600 µJ) combined with high repetition rates push femtosecond micromachining applications to highest levels of throughput at lowest cost-of-ownership. The user-configurable burst mode enables processing with increased ablation efficiency, and thus increased throughput and quality for certain materials. Pulse energy and repetition rate adjustability (single shot – 30 MHz) make the Spirit 1030-140 the ideal source for ablation and cutting. The integrated pulse picker offers full control of the laser output with single pulse selection and fast power control via an analog input signal.
Spirit 515-50 offers an output power of >50 W and a typical pulse width of <300 fs at a wavelength of 515 nm. At this shorter wavelength, machining of the finest features is possible, depending on the material, at equal or even higher speeds compared to those obtained with other technologies.
24/7 Industrial Reliability
The Spirit lasers are designed and tested to rigorous quality standards for reliable 24/7 operation. The built-in data logging and analysis capability allows monitoring of all relevant laser parameters over the life time of the system. As such, this represents an indispensable diagnostics tool for service and preventive maintenance which significantly enhances uptime and thus productivity of the tool.
호환 가능한 파워 센서
Spirit레이저의 출력 확인과 분석은, OphirF150(200)A-CM-16 (7Z07107) 또는 F80(120)A-CM-17 (7Z07103)열 전력 센서와 Centauri 레이저 파워 미터를 추천합니다. 이 레이저 측정 장비에 대한 추가 정보는 ophiropt.com 에서 웹사이틍서 찾아 볼 수 있습니다. 다른 Ophir 센서와 미터기도 용도에 따라 Spirit 에 적합할 수 있습니다. 또한 Ophir는 레이저 시스템 개발자들과의 협력을 통해 임베디드 빔 진단법을 구축하여, OEM 솔루션으로서 시스템 성능을 모니터합니다.
Recommended Optics & Optomechanics
It is critical to choose the right optics and optomechanical components that work best with your Spirit laser. Spirit’s high IR and green average output power, and in particular the high peak power of femtosecond pulses necessitate optics that have a high damage threshold. MKS Newport offers a wide selection of the highest quality optics and optical components covering the entire spectrum UV, VIS, NIR and IR wavelengths to help you with your most challenging applications.
리소스
Technical Articles
극초단 펄스 레이저를 이용한 니티놀 미세가공 최적화 더 나은 시력을 위한 안전한 방법(2.8 MB, PDF) 평균 출력 1kW에서 뛰어난 빔 품질로 sub-400fs 펄스를 구현하는 Thin-disk 다중 패스 증폭기(6 MB, PDF) 고출력 산업용 펨토초 레이저를 사용한 폴리머 필름 가공(545.4 kB, PDF) 펨토초 버스트를 사용한 다결정 다이아몬드 가공(1.7 MB, PDF) 정밀 가공을 위한 강력한 선택, 극초단 펄스 레이저 (1.7 MB, PDF) 미세 가공을 위한 새로운 기능, 하이브리드 파이버 레이저 초고소 레이저 유리 절단(464.9 kB, PDF) 마이크로일렉트로닉스 제조용 세라믹의 레이저 가공 펨토초 레이저: 더 많은 미세 가공 어플리케이션 펨토초 레이저를 사용한 니티놀 정밀 가공 어플리케이션(430.4 kB, PDF) Boosting ultrafast lasers’ medical benefits
Data Sheets
Spirit HE Datasheet(832.9 kB, PDF) Spirit One Datasheet(933.2 kB, PDF)
Selection Guides
Spirit 제품 선택 가이드(952.7 kB, PDF)
Drawings & CAD
Spirit HE Dimensions(1.5 MB, PDF) Spirit One Dimensions(771.1 kB, PDF)
사전 설치 가이드
Spirit 그리고 HighQ-2 사전 설치 가이드(298.6 kB, PDF)
Literature
Ultrafast Lasers Brochure(4.6 MB, PDF)
Application Notes
펨토초 레이저를 이용한 폴리머의 고품질 절단(643.1 kB, PDF) Spirit 펨토초 레이저를 이용한 Nitinol 정밀 가공 어플리케이션(1.1 MB, PDF) 펨토초 버스트를 사용한 다결정 다이아몬드 가공(475.6 kB, PDF) 투명도가 높은 김 서림 방지 유리 표면 제작(456.3 kB, PDF) 초경도 재료의 뛰어난 속도와 품질 가공(1.3 MB, PDF) 고출력 펨토초 레이저를 사용한 유연 OLED 제조(808.8 kB, PDF) 100 W 펨토초 레이저를 이용한 초고속 플라스틱 가공 (468.5 kB, PDF) 초소수성 및 초친수성 표면의 제작(444.9 kB, PDF) 광섬유 확산기 제작(372.9 kB, PDF) 열에 민감한 폴리머의 레이저 미세가공(356 kB, PDF) 투명 취성 재료의 고품질, 고속 가공(507.8 kB, PDF) 극초단 펄스 레이저 구조화(414.2 kB, PDF) 펨토초 레이저 조사 및 화학 에칭 (FLICE); 도파로 패턴 새기기(2.8 MB, PDF)





