Breakthrough High-Power UV and IR Femtosecond Lasers
for 24/7 Micromachining of Critical Materials
Applications
Specifications
Output Characteristics1, 2
| IceFyre FS UV50 | IceFyre FS IR200 | |
|---|---|---|
| Wavelength | 343 ±2 nm | 1030 ± 6 nm |
| Power | >50 W @ 1 MHz and 1.25 MHz | >200 W @ 1-50 MHz |
| Maximum Pulse Energy | >50 μJ @ 1 MHz | >200 µJ @ 1 MHz |
| Repetition Rate Range | Single shot to 3 MHz | Single shot to 50 MHz |
| Pulse Width, FWHM | <500 fs | |
| Pulse-to-Pulse Energy Stability | <2% rms | |
| Power Stability (after warm-up) | <1% rms over 8 hours | |
| Spatial Mode | TEM00, (M2 <1.3) | |
| Polarization | >100:1 vertical | |
| Beam Diameter at Exit | 5.0 ±0.5 mm | 4.0 ±0.5 mm |
| Beam Divergence, full angle | <0.20 mrad | <1.0 mrad |
| Beam Pointing Stability | <±25 µrad/°C | |
| PSO Capability (Position Synchronized Output) | Yes | |
| Pulse-on-Demand Triggering (internal and external) | Yes | |
| TimeShift Programmable Burst Mode | Yes | |
Operating Conditions3
| IceFyre FS UV50 | IceFyre FS IR200 | |
|---|---|---|
| Warm-up Time, Typical | <30 min from warm start mode, <60 min from cold start | |
| Temperature Range | 18-35°C | |
| Altitude | 0-2,000 m | |
| Relative Humidity | 0-65% non-condensing, dew point <19°C | |
Storage Conditions3
| IceFyre FS UV50 | IceFyre FS IR200 | |
|---|---|---|
| Temperature Range | 0-50°C | |
| Altitude | 0-2,000 m | |
| Relative Humidity | 0-90% non-condensing, dew point <22°C | |
Physical Characteristics4
| IceFyre FS UV50 | IceFyre FS IR200 | |
|---|---|---|
| Laser Dimensions (L x W x H)5 | 35.67 x 17.05 x 6.89 in (906 x 433 x 175 mm) | |
| Laser Weight | 150 lbs (68 kg) | |
| Utility Module Dimension (L x W x H) | 17.99 x 18.98 x 3.96 in (457.1 x 482.1 x 100.7 mm) | |
| Utility Module Weight | 24.25 lbs (11 kg) | |
Features
| IceFyre FS UV50 | IceFyre FS IR200 | |
|---|---|---|
| EU RoHS 2 Compliant, China RoHS 2, CE Compliant | Product compliant with restriction of hazardous substances | |
| Internal Power Monitor | Yes | |
| Replaceable Output Window | Yes, customer and field replaceable | |
| Optional Safety Shutter | Externally mounted for easy field service | |
| Replaceable Active Laser Purge System (ALPS) | Yes | |
| Replaceable Head Desiccant | Yes | |
| Data Log | Long and short term recording for diagnostics and equipment maintenance | |
Footnotes:
- Due to our continuous product improvement program, specifications may change without notice.
- . IceFyre FS is a Class IV - High-Power Laser, whose beam is, by definition, a safety and fire hazard. Take precautions to prevent exposure to the direct and reflected beams. Diffuse as well as specular reflections can cause severe skin or eye damage
- High temperature, high humidity operation limited to dew point <19°C; high temperature, high humidity storage limited to dew point <22°C.
- AC to DC converter module included with standard system.
- Dimensions noted do not include the removable lift handles.
Features
24/7 Industrial Reliability
Building on MKS’ deep experience and technology, the patent-pending IceFyre FS lasers pass extensive environmental qualification testing to ensure high reliability and a low cost-of-ownership. Fully automated and computer controlled, the laser exhibits exceptional stability in power, beam parameters, and beam pointing during 24/7 operation to deliver high precision and reproducibility for demanding applications.
Compatible Power Sensors
To verify and analyze the output power of your IceFyre FS laser, we recommend the Ophir F150(200)A-CM-16 (7Z07107) thermal power sensor and Centauri laser power meter. Additional information on this laser measurement equipment can be found on the ophiropt.com website. Other Ophir sensors and meters may also be suitable for the IceFyre FS, depending on application. Ophir also works with laser system developers to achieve embedded beam diagnostics to monitor system performance as an OEM solution.
Overview
The IceFyre FS family is an extraordinary leap forward in industrial femtosecond laser technology, delivering industry-leading performance, versatility, reliability, and cost-of-ownership. The IceFyre FS femtosecond lasers are ideal for high throughput, highest-quality micromachining of critical materials, including glass, polymers, metals, semiconductors, thin films, and composites for demanding consumer electronics, clean energy, medical device, and industrial applications. Based on Spectra-Physics’ It’s in the Box™ design, IceFyre FS integrates laser and control electronics in a single, easy-to-install package.
Exceptional Versatility for Optimal Process Performance
IceFyre FS UV50 is the highest-performing UV femtosecond laser on the market, providing >50 W of UV output power, >50 µJ pulse energy, and pulse widths of <500 fs at high repetition rates up to 3 MHz. IceFyre FS IR200 delivers high average power (>200 W) and high pulse energy (>200 µJ) with a wide repetition-rate range from a single shot to 50 MHz in the infrared. High average power (>200 W) and high pulse energy (>200 µJ)combined with high repetition rates up to 50 MHz push femtosecond micromachining applications to the highest levels of throughput at the lowest cost-of-ownership.
The IceFyre FS platform delivers exceptional versatility for optimal process performance. It offers flexible burst-mode operation with adjustable repetition rates, pulse-on-demand (POD) and position-synchronized output (PSO) triggering, and TimeShift™ programmable pulse capability for flexible burst-mode operation.
Resources
Technical Articles
Lasers Illuminate the Roadmap for Advanced Packaging(1.6 MB, PDF) On the Road to Sustainable Clean Energy Tech, a Laser-Based Method Rises to the Fore Optimizing Laser Cutting in Semiconductor Advanced Packaging Optimizing Laser Cutting of Li-Ion Battery Foils Optimizing Nitinol Micromachining with Ultra-Short Pulse Lasers How USP Laser Settings Drive Applications in EV Production Optimising Femtosecond Laser Pulses for Superior Quality(1.8 MB, PDF) Industrial Femtosecond Laser Advancements Power Next-Generation Applications Ultrashort Pulse Laser Cutting of Clear Polyimide and Hard Coat Film Stacks for Flexible OLED Displays(517.5 kB, PDF) Ultrashort-Pulse Lasers Power Options for Precise Machining(1.7 MB, PDF) Glass microwelding with ultrashort-pulse lasers Picosecond Lasers Transform Volume Manufacturing Hybrid Fiber Lasers Create New Capabilities for Micromachining Ultrashort Pulse Laser Technology for Processing of Advanced Electronics Materials(616.4 kB, PDF) Hybrid Fiber Lasers Raise the Bar for Precision Manufacturing(288.1 kB, PDF) Nano to Pico to Femto: Pulse Widths for Optimal Laser Micromachining Outcomes Femtosecond Lasers Enable Innovative Surfaces for Controlling Water Femtosecond Lasers Enable Innovative Surfaces for Controlling Water
Application Notes
Enhanced PCD Ablation with the IceFyre FS IR200 Femtosecond Laser Using Burst-Mode Operation(1.2 MB, PDF) Ablation Efficiency in Silicon Carbide Comparing UV Nanosecond and IR Femtosecond Laser Technologies(1.9 MB, PDF) Laser Contact Opening (LCO) + Plating as a Sustainable Solution for TOPCon Solar Cells(1.9 MB, PDF) Fast Lithium-Ion Battery Electrode Cutting with High-Power Femtosecond Pulses (1.2 MB, PDF) Femtosecond Pulses Combine with PSO Technology for Excellent Quality and High Throughput(1.7 MB, PDF) Cutting OLED Smartphone Displays with a UV Femtosecond Laser(1.8 MB, PDF) High-Quality Cutting of Thin Polymer Films with a High-Power Femtosecond UV Laser(2.7 MB, PDF)
Data Sheets
IceFyre-FS-Datasheet(1.2 MB, PDF)
Literature
Accelerating Perovskite Solar Cells Manufacturing(7 MB, PDF) Transforming Lithium-Ion Battery Manufacturing(7.8 MB, PDF) Transforming OLED Panel Processing Brochure(6.4 MB, PDF)
Drawings & CAD
IceFyre FS Dimensions(694.5 kB, PDF)
