MKS Debuts Breakthrough >50 W UV Femtosecond Laser for 24/7 Micromachining of Critical Materials

Extends Industry-Leading Spectra-Physics Portfolio Across Femto to Nanosecond and UV to IR

Andover, MA – April 25, 2022MKS Instruments, Inc.(NASDAQ: MKSI) introduces its Spectra-Physics® IceFyre® FS UV50 Laser, an industrial femtosecond laser with >50 W UV power, high reliability and low cost of ownership. The new laser offers exceptional versatility with pulse-on-demand (POD) and position-synchronized output (PSO) triggering and TimeShift™ programmable burst mode for optimal process performance. The IceFyre FS UV50 Laser is ideal for high throughput, highest quality micromachining of critical materials including polymers, metals, semiconductors, thin films and composites for demanding consumer electronics, clean energy, medical device, and industrial applications.

"IceFyre FS UV50 is an extraordinary leap forward in femtosecond UV laser technology, delivering industry-leading performance, versatility, reliability and cost of ownership for 24/7 manufacturing,"

said Dave Allen, Senior Vice President and General Manager for Spectra-Physics lasers.
"The new laser is another key demonstration of MKS leadership in micromachining, extending the Spectra-Physics portfolio across fs, ps and ns pulse widths and UV to infrared wavelengths."

IceFyre FS UV50 is a versatile laser with adjustable repetition rates from single shot to 3 MHz and TimeShift programmable pulse capability for flexible burst-mode operation. The laser’s It’s in the BoxTM design integrates laser and control electronics in a single, easy-to-install package.

Building on MKS’ deep experience and technology, IceFyre FS lasers pass extensive environmental qualification testing to ensure high reliability and low cost-of-ownership. Fully automated and computer controlled, the laser exhibits exceptional stability in power, beam parameters, and beam pointing during 24/7 operation to deliver high precision and reproducibility for demanding applications.

The new Spectra-Physics IceFyre FS UV50 laser will be featured at Laser World of Photonics, Messe München, Munich, Germany, April 26-29, 2022. Please visit MKS at booth A6.219 for a demonstration.

For more information, please see

Spectra-Physics and IceFyre are registered trademarks, and TimeShift is a trademark of MKS Instruments, Inc., or a subsidiary of MKS Instruments, Inc.

About MKS Instruments

MKS Instruments, Inc. (NASDAQ: MKSI) is a global provider of instruments, systems, subsystems and process control solutions that measure, monitor, deliver, analyze, power and control critical parameters of advanced manufacturing processes to improve process performance and productivity for our customers. Our products are derived from our core competencies in pressure measurement and control, flow measurement and control, gas and vapor delivery, gas composition analysis, electronic control technology, reactive gas generation and delivery, power generation and delivery, vacuum technology, temperature sensing, lasers, photonics, optics, precision motion control, vibration control and laser-based manufacturing systems solutions. We also provide services relating to the maintenance and repair of our products, installation services and training. Our primary served markets include semiconductor, industrial technologies, life and health sciences, and research and defense. Additional information can be found at

About the Spectra-Physics Brand

Spectra-Physics is a brand within the MKS Instruments Light & Motion division. The Spectra-Physics product portfolio consists of a broad spectrum of lasers for precision industrial and scientific research applications. Spectra-Physics products combine groundbreaking laser technologies with deep applications expertise to deliver disruptive performance and lower total cost of ownership. From the manufacturing floor and semiconductor fab to the research laboratory, Spectra-Physics lasers enhance our customers’ capabilities and productivity in the semiconductor, industrial technologies, life and health sciences, and research markets. For more information, visit

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