MKS Pioneers New Standard in Carrier-Envelope Phase Stabilization for Attosecond Science

New CEP6 Technology Results in Record CEP Stability in
Regenerative Ultrafast Amplifiers

Andover, MA – June 26, 2023MKS Instruments, Inc.(NASDAQ: MKSI) announces its Spectra-Physics® CEP6 technology, the most advanced carrier-envelope phase (CEP) stabilization capability that delivers record-low CEP noise in highly stable regenerative ultrafast amplifiers. Used with the highly successful Spectra-Physics Spitfire® Ace ultrafast amplifiers, CEP6 results in >5 mJ, <25 fs pulses with an unprecedented CEP-stability of <100 mrad (10-shot average) and <300 mrad single-shot over many hours of continuous operation. With this incomparable performance and stability, CEP6 is ideal for cutting-edge attosecond (10-18 s) science and high-harmonic generation applications.

"CEP6 is a remarkable innovation, delivering record CEP stability in proven regenerative ultrafast amplifiers, and a powerful tool for advancing the important field of attoscience,"
says Herman Chui, Vice President and General Manager for Spectra-Physics lasers.
"As the pioneer in ultrafast lasers, Spectra-Physics lasers continue to lead the industry, and CEP6 furthers that leadership and truly pushes the boundaries of possibility."

CEP6 utilizes a f-to-2f interferometer to measure the carrier frequency through octave spanning of the Element 2 oscillator output. Unlike traditional CEP-stabilized oscillators that utilize the resulting error signal to feedback to the oscillator through mechanical control of the prism or adjusting the pump laser output, the patent-pending CEP6 feed-forward approach alleviates this requirement and extends the technology to regenerative amplifiers. This enables the system to be significantly less sensitive to external perturbations, resulting in many hours of stable, low CEP-noise operation.

The new Spectra-Physics CEP6 capability and Spitfire Ace ultrafast amplifier will be featured at Laser World of Photonics, Messe München, Munich, Germany, June 27-30, 2023. Please visit MKS at Hall A3, Booth #219 for a demonstration. For more information, please see

Spectra-Physics® and Spitfire® are registered trademarks, and CEP6, Ace and Element are trademarks of MKS Instruments, Inc., or a subsidiary of MKS Instruments, Inc.

About MKS Instruments

MKS Instruments, Inc. (NASDAQ: MKSI) enables technologies that transform our world. We deliver foundational technology solutions to leading edge semiconductor manufacturing, advanced electronics and specialty industrial applications. We apply our broad science and engineering capabilities to create instruments, subsystems, systems, process control solutions and specialty chemicals technology that improve process performance, optimize productivity and enable unique innovations for many of the world’s leading technology and industrial companies. Our solutions are critical to addressing the challenges of miniaturization and complexity in advanced device manufacturing by enabling increased power, speed and feature enhancement for optimized connectivity. Our solutions are also critical to addressing ever-increasing performance requirements across a wide array of specialty industrial applications. Additional information can be found at

MKS Photonics Solutions

Spectra-Physics, Ophir and Newport are brands within the MKS Instruments Photonics Solutions division. We provide a full range of solutions including lasers, beam measurement and profiling, precision motion control, vibration isolation systems, photonics instruments, temperature sensing, opto-mechanical components and optical elements.

About the Spectra-Physics Brand

Spectra-Physics is a brand within the MKS Instruments Photonics Solutions Division. The Spectra-Physics product portfolio consists of a broad spectrum of lasers for precision industrial and scientific research applications. Spectra-Physics products combine groundbreaking laser technologies with deep applications expertise to deliver disruptive performance and lower total cost of ownership. From the manufacturing floor and semiconductor fab to the research laboratory, Spectra-Physics lasers enhance our customers’ capabilities and productivity in the semiconductor, industrial technologies, life and health sciences, and research markets. For more information, visit

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