product announcement


New >30 W, High Energy Femtosecond Laser Ideal for High Speed, Highest Quality Manufacturing

Andover, MA – January 25, 2017 – MKS Instruments, Inc. (NASDAQ: MKSI) announces that its Spectra-Physics® business unit introduces Spirit®HE 1040-30, a high power, high energy industrial femtosecond laser.  The new laser delivers >30 W power, >120 µJ energy for high throughput micromachining without unwanted heat damage to the processed part.  Rugged with proven high reliability, Spirit HE 1040-30 is ideal for precision 24/7 manufacturing of a wide range of materials for consumer electronics, clean energy, medical devices, automotive, and other industrial applications.

“With its high average power, pulse energy and robustness, Spirit HE is the perfect tool for applications requiring both highest quality and throughput,” says Klaus Hartinger, product manager at Spectra-Physics.  “Spirit HE 1040-30 effectively doubles the power of the proven and widely deployed Spirit industrial product family.”

Spirit HE 1040-30 offers process flexibility with programmable pulse energy, adjustable repetition rate from single shot to 1 MHz, as well as burst mode for increased efficiency. Options are also available for adjustable pulse duration, allowing the user to freely choose pulse durations from <400 fs to 10 ps by software, and integrated second harmonic generation (SHG), for software selectable 520 nm or 1040 nm output.  The SHG option of Spirit HE 1040-30 offers a maximum output power of >15 W and >60 µJ maximum pulse energy at 520 nm.  The laser includes an integrated pulse picker for single-pulse selection and fast power control for high process throughput.

When Spirit HE 1040-30 is coupled with the Spirit-NOPA-VISIR, the combined system delivers high energy tunable laser output across the visible and infrared and is ideal for 3-photon deep-tissue bio-imaging and ultrafast spectroscopy applications.

Building on the highly successful and dependable Spirit product line, Spirit HE 1040-30 has passed extensive environmental qualification testing to ensure high reliability. Fully automated and computer controlled, Spirit HE 1040-30 has exceptional stability of power and beam pointing during 24/7 operation, ensuring high reproducibility and precision for demanding applications.

Spectra-Physics’ Spirit HE 1040-30 laser will be featured at SPIE Photonics West and BIOS, Moscone Center, San Francisco, California, January 28 to February 2, 2017.  Please visit MKS at booth #1400 at SPIE Photonics West or booth #8722 at SPIE BIOS for a demonstration.  For more information, please see

About MKS

MKS Instruments, Inc. (NASDAQ: MKSI) is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity. Our products are derived from our core competencies in pressure measurement and control, materials delivery, gas composition analysis, control and information technology, power and reactive gas generation, vacuum technology, photonics, optics, lasers and motion control. Our primary served markets are manufacturers of capital equipment for electronic thin film, process manufacturing, environmental monitoring and life sciences, as well as government and research.

About Spectra-Physics Business Unit

Spectra-Physics delivers breakthrough laser technologies that transform the way businesses operate and people live.  From the manufacturing floor to the operating room to the research laboratory, Spectra-Physics has blazed a trail of discovery and success in lasers that continues to advance every day.  Spectra-Physics is singularly focused on helping customers use precision laser technologies to advance leading-edge science and propel industries forward.  We do so by offering groundbreaking technologies, deep applications expertise, disruptive cost-performance, a commitment to world-class customer experience, and the highest standards for operational excellence and continuous global improvement. 

Company Contact

Herman Chui
Sr. Director of Product Marketing
Tel: +1 408-980-6996

Helen Chan
Marketing Communications Manager
Tel: +1 408-980-5883