product announcement


New Spirit 1030-100 Enables High Throughput, Highest Quality Micromachining

Andover, MA – June 22, 2017 MKS Instruments, Inc. (NASDAQ: MKSI) announces the introduction of its Spectra-Physics® Spirit®1030-100, an industrial femtosecond hybrid fiber laser that delivers >100 W infrared power and >100 µJ pulse energy with ultrashort <400 fs pulses for fast, highest quality micromachining.  The new laser offers high flexibility with optional integrated second harmonic generation (SHG) for >50 W green output, burst mode, and triggered pulse output.  With proven 24/7 industrial reliability, Spirit 1030-100 is ideal for high throughput micromachining for consumer electronics, clean energy, automotive, medical devices, and other industrial applications.

“With unsurpassed performance, high flexibility, and high reliability, Spirit 1030-100 truly sets a new standard for high precision femtosecond micromachining,” says Dave Allen, senior vice president and general manager for Spectra-Physics lasers.  “With this major new introduction, we further our industry-leading portfolio of lasers for precision micromachining spanning nanosecond to picosecond to femtosecond.”

Spirit 1030-100 offers adjustable repetition rates from single shot to 10 MHz and best-in-class beam quality, and includes an integrated pulse picker for single-pulse selection and fast power control for high process throughput.  Based on the proven Spirit industrial product platform, Spirit 1030-100 has been extensively tested for high reliability, built with wide overhead on all critical elements, and utilizes advanced monitoring and diagnostics for 24/7 industrial reliability and lowest cost of ownership.  Available in >100 W and >70 W configurations, the new laser is ideal for machining of hard brittle materials including glass, sapphire and polycrystalline diamond as well as thin metals and polymers.  When coupled with the Spirit-OPA and Spirit-NOPA, the combined system delivers high energy tunable laser output across the visible and infrared for 3-photon deep-tissue bio-imaging and ultrafast spectroscopy applications.

Spectra-Physics’ Spirit 1030-100 laser will be featured at Laser World of Photonics, Munich, Germany, June 26 to 29, 2017. Please visit MKS at hall A2, booth 209 at Laser World of Photonics for a demonstration. For more information, please see

About MKS

MKS Instruments, Inc. (NASDAQ: MKSI) MKS Instruments, Inc. (NASDAQ: MKSI) is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity. Our products are derived from our core competencies in pressure measurement and control, materials delivery, gas composition analysis, control and information technology, power and reactive gas generation, vacuum technology, photonics, optics, lasers and motion control. Our primary served markets are manufacturers of capital equipment for electronic thin film, process manufacturing, environmental monitoring and life sciences, as well as government and research.

About the Spectra-Physics Brand

The Spectra-Physics brand comprises breakthrough laser technologies that transform the way businesses operate and people live. From the manufacturing floor to the operating room to the research laboratory, we have blazed a trail of discovery and success in lasers that continues to advance every day. The Spectra-Physics brand is singularly focused on helping customers use precision laser technologies to advance leading-edge science and propel industries forward. We do so by offering groundbreaking technologies, deep applications expertise, disruptive cost-performance, a commitment to world-class customer experience, and the highest standards for operational excellence and continuous global improvement.

Company Contact

Herman Chui
Sr. Director of Product Marketing
Tel: +1 408-980-6996

Helen Chan
Marketing Communications Manager
Tel: +1 408-980-5883