High-Power Femtosecond Lasers: The New Standard for High-Precision Micromachining
- High average power up to >30 W and pulse energy up to >120 µJ
- User adjustable repetition rate (single shot – 1 MHz)
- Integrated pulse-picker with analog-in triggering
- Fully automated and computer controlled
- IceFyre FS replaces Spirit 1030-140, 100, and 70 See All Features
Applications
- OLED Display Manufacturing
- Laser Cutting and Drilling
- Semiconductor Wafer Dicing
- Polymer Cutting
- Metal Cutting and Drilling
- Sapphire Cutting and Drilling
- Polycrystalline Diamond (PCD) Cutting and Ablation
- Precision Micromachining of Hard and Brittle Materials
- 3-Photon Fluorescence Microscopy
- Optical Parametric Amplifier Pumping
Specifications
Features
Overview
Spirit® sets new standards for femtosecond lasers in high-precision industrial manufacturing for micromachining of polymers, thin metals, sapphire, polycrystalline diamond, and many other materials. These lasers deliver high average power, high pulse energy, and high repetition rates for increased throughput. Customers benefit from the shortest industrially available pulse duration and superior beam quality that in turn enables machining complex and challenging parts with highest precision and quality with literally no heat affected zone (HAZ) at the highest throughput.
Highest Quality, High Throughput Micromachining
Our new additions to the industry-proven Spirit platform offers impressive versatility and performance, enabling a variety of applications. High average power (>140 W) and high pulse energy (>600 µJ) combined with high repetition rates push femtosecond micromachining applications to highest levels of throughput at lowest cost-of-ownership. The user-configurable burst mode enables processing with increased ablation efficiency, and thus increased throughput and quality for certain materials. Pulse energy and repetition rate adjustability (single shot – 30 MHz) make the Spirit 1030-140 the ideal source for ablation and cutting. The integrated pulse picker offers full control of the laser output with single pulse selection and fast power control via an analog input signal.
Spirit 515-50 offers an output power of >50 W and a typical pulse width of <300 fs at a wavelength of 515 nm. At this shorter wavelength, machining of the finest features is possible, depending on the material, at equal or even higher speeds compared to those obtained with other technologies.
24/7 Industrial Reliability
The Spirit lasers are designed and tested to rigorous quality standards for reliable 24/7 operation. The built-in data logging and analysis capability allows monitoring of all relevant laser parameters over the life time of the system. As such, this represents an indispensable diagnostics tool for service and preventive maintenance which significantly enhances uptime and thus productivity of the tool.
Compatible Power Sensors
To verify and analyze the output power of your Spirit laser, we recommend the Ophir F150(200)A-CM-16 (7Z07107) or F80(120)A-CM-17 (7Z07103) thermal power sensor and Centauri laser power meter. Additional information on this laser measurement equipment can be found on the ophiropt.com website. Other Ophir sensors and meters may also be suitable for the Spirit, depending on application. Ophir also works with laser system developers to achieve embedded beam diagnostics to monitor system performance as an OEM solution.
Recommended Optics & Optomechanics
It is critical to choose the right optics and optomechanical components that work best with your Spirit laser. Spirit’s high IR and green average output power, and in particular the high peak power of femtosecond pulses necessitate optics that have a high damage threshold. MKS Newport offers a wide selection of the highest quality optics and optical components covering the entire spectrum UV, VIS, NIR and IR wavelengths to help you with your most challenging applications.
Resources
Technical Articles
Optimizing Nitinol Micromachining with Ultra-Short Pulse Lasers A Safe Way to Better Vison(2.8 MB, PDF) Thin-disk multipass amplifier delivering sub-400 fs pulses with excellent beam quality at an average power of 1 kW(6 MB, PDF) Polymer Film Processing with a High-power Industrial Femtosecond Laser(545.4 kB, PDF) Polycrystalline Diamond Machining with Femtosecond Bursts(1.7 MB, PDF) Ultrashort-Pulse Lasers Power Options for Precise Machining(1.7 MB, PDF) Hybrid Fiber Lasers Create New Capabilities for Micromachining Cutting Thin Glasses with Ultrafast Lasers(464.9 kB, PDF) Laser Processing of Ceramics for Microelectronics Manufacturing Femtosecond Lasers: More Micromachining Apps Nitinol Machining for Precision Applications Using Femtosecond Lasers (430.4 kB, PDF) Boosting Ultrafast Lasers’ Medical Benefits
Data Sheets
Spirit HE Datasheet(832.9 kB, PDF) Spirit One Datasheet(933.2 kB, PDF)
Selection Guides
Spirit Component Selection Guide(952.7 kB, PDF)
Drawings & CAD
Spirit HE Dimensions(1.5 MB, PDF) Spirit One Dimensions(771.1 kB, PDF)
Pre-installation Guides
Spirit® and HighQ-2™ Pre-installation Guide(298.6 kB, PDF)
Literature
Ultrafast Lasers Brochure(4.6 MB, PDF)
Application Notes
High-Quality Cutting of Polymers with Femtosecond Lasers(1.7 MB, PDF) Nitinol Machining for Precision Applications Using Spirit® Femtosecond Lasers(1.1 MB, PDF) Polycrystalline Diamond Machining with Femtosecond Bursts(475.6 kB, PDF) Fabrication of Highly Transparent Anti-Fogging Glass Surfaces(456.3 kB, PDF) Processing of Ultrahard Materials at Superior Speed and Quality(1.3 MB, PDF) Flexible OLED Manufacturing with High Power fs Laser(808.8 kB, PDF) High Speed Processing of Plastics with a 100 W fs Laser(468.5 kB, PDF) Fabrication of Superhydrophobic and Superhydrophilic Surfaces(444.9 kB, PDF) Fabrication of Optical Fiber Diffusors(372.9 kB, PDF) Laser Micromachining of Heat-sensitive Polymers(356 kB, PDF) High Quality, High Speed Processing of Transparent Brittle Materials(507.8 kB, PDF) Ultrashort-pulse Laser Structuring(414.2 kB, PDF) Femtosecond Laser Irradiation and Chemical Etching (FLICE); Waveguide Writing(2.8 MB, PDF)



